Abstract

Subaperture stitching is an economical way to extend small-region, high-resolution interferometric metrology to cover large-aperture optics. Starting from system geometry and measurement noise knowledge, this work derives an analytical expression for how noise in an annular ring of subapertures leads to large-scale errors in the computed stitched surface. These errors scale as $\sin {(\pi p/M)}^{-2}$ where $p$ is the number of sine periods around the annular full-aperture and $M$ is the number of subaperture measurements. Understanding how low-spatial-frequency surface errors arise from subaperture noise is necessary for tolerancing systems which use subaperture stitching.

© 2015 Optical Society of America

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