Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Molybdenum/silicon multilayer components for high harmonic generation sources

Abstract

High harmonic generation sources have made great progress over the past decade and now readily support applications in the extreme ultraviolet (EUV) regime and beyond. In many applications, the keys to the utility of these sources are multilayer components such as mirrors and beam splitters. Here we present recent results in the development and fabrication of such components in the EUV regime, including line-narrowing mirrors achieving bandwidths (λ/Δλ) of 175, single and multiple harmonic-selecting multilayers with reflectances of greater than 40% in the 13 nm range, and ultralow stress membrane beam splitters enabling direct EUV pulse energy monitoring.

© 2015 Optical Society of America

Full Article  |  PDF Article
More Like This
Generation of circularly polarized high harmonic radiation using a transmission multilayer quarter waveplate

Jürgen Schmidt, Alexander Guggenmos, Michael Hofstetter, Soo Hoon Chew, and Ulf Kleineberg
Opt. Express 23(26) 33564-33578 (2015)

Electro-optical system for scanning microscopy of extreme ultraviolet masks with a high harmonic generation source

Patrick P. Naulleau, Christopher N. Anderson, Erik H. Anderson, Nord Andreson, Weilun Chao, Changhoon Choi, Kenneth A. Goldberg, Eric M. Gullikson, Seong-Sue Kim, Donggun Lee, Ryan Miyakawa, Jongju Park, Seno Rekawa, and Farhad Salmassi
Opt. Express 22(17) 20144-20154 (2014)

Analysis of buried interfaces in multilayer mirrors using grazing incidence extreme ultraviolet reflectometry near resonance edges

M. G. Sertsu, M. Nardello, A. Giglia, A. J. Corso, C. Maurizio, L. Juschkin, and P. Nicolosi
Appl. Opt. 54(35) 10351-10358 (2015)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved