Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Lateral resolution and transfer characteristics of vertical scanning white-light interferometers

Not Accessible

Your library or personal account may give you access

Abstract

White-light interferometers are widely used for high-accuracy topography measurement in industrial and scientific applications. A common way to characterize a white-light interferometer is to assume small surface amplitudes resulting in linear transfer characteristics described by the instrument transfer function (ITF). However, the well-known batwing effect gives rise to systematic errors, causing extra nonlinearity to the ITF. In this paper a model to simulate an interference pattern in the image plane as it is obtained by a vertical scanning white-light interferometer is introduced in order to overcome the limitation of small surface amplitudes. Repeating the simulation procedure for different height positions of the object results in an image stack that can be analyzed by the same algorithms as real measurement data. The simulation results agree with experimental observations: the batwing effect occurs in certain situations and the correct amplitude of a rectangular grating structure can be obtained as long as the structure is optically resolved. Both simulation, as well as experimental results, provide transfer characteristics of broader bandwidth than predicted by theoretical approaches based on linear system behavior.

©2012 Optical Society of America

Full Article  |  PDF Article
More Like This
Lateral scanning white-light interferometer

Artur Olszak
Appl. Opt. 39(22) 3906-3913 (2000)

Fringe modulation skewing effect in white-light vertical scanning interferometry

Akiko Harasaki and James C. Wyant
Appl. Opt. 39(13) 2101-2106 (2000)

Self-calibrating lateral scanning white-light interferometer

Florin Munteanu
Appl. Opt. 49(12) 2371-2375 (2010)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (13)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (12)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved