Characterization of zirconia– and niobia–silica mixture coatings produced by ion-beam sputtering

Andrius Melninkaitis; Tomas Tolenis; Lina Mažulė; Julius Mirauskas; Valdas Sirutkaitis; Benoit Mangote; Xinghai Fu; Myriam Zerrad; Laurent Gallais; Mireille Commandré; Simonas Kičas; Ramutis Drazdys

doi:10.1364/AO.50.00C188

Applied Optics
Vol. 50,
Issue 9,
pp. C188-C196
(2011)
•https://doi.org/10.1364/AO.50.00C188

Characterization of zirconia– and niobia–silica mixture coatings produced by ion-beam sputtering

Andrius Melninkaitis, Tomas Tolenis, Lina Mažulė, Julius Mirauskas, Valdas Sirutkaitis, Benoit Mangote, Xinghai Fu, Myriam Zerrad, Laurent Gallais, Mireille Commandré, Simonas Kičas, and Ramutis Drazdys

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Andrius Melninkaitis, Tomas Tolenis, Lina Mažulė, Julius Mirauskas, Valdas Sirutkaitis, Benoit Mangote, Xinghai Fu, Myriam Zerrad, Laurent Gallais, Mireille Commandré, Simonas Kičas, and Ramutis Drazdys, "Characterization of zirconia– and niobia–silica mixture coatings produced by ion-beam sputtering," Appl. Opt. 50, C188-C196 (2011)

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Abstract

${ZrO}_{2} - {SiO}_{2}$ and ${Nb}_{2} O_{5} - {SiO}_{2}$ mixture coatings as well as those of pure zirconia ( ${ZrO}_{2}$ ), niobia ( ${Nb}_{2} O_{5}$ ), and silica ( ${SiO}_{2}$ ) deposited by ion-beam sputtering were investigated. Refractive-index dispersions, bandgaps, and volumetric fractions of materials in mixed coatings were analyzed from spectrophotometric data. Optical scattering, surface roughness, nanostructure, and optical resistance were also studied. Zirconia– silica mixtures experience the transition from crystalline to amorphous phase by increasing the content of ${SiO}_{2}$ . This also results in reduced surface roughness. All niobia and silica coatings and their mixtures were amorphous. The obtained laser-induced damage thresholds in the subpicosecond range also correlates with respect to the silica content in both zirconia– and niobia–silica mixtures.

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Sample	$l_{ph .}$ (nm)	$n_{1064}$	$n_{1030}$	$E_{g C}$ (eV)	$E_{g T}$ (eV)	$E_{g U}$ (eV)	$f_{H (LL)}$	$f_{H (BG)}$	$f_{H (MG)}$
Pure Materials:
Substrate	$1 mm$	1.46	1.46	—	—	$\approx 9$ [41]	—	—	—
${SiO}_{2}$	1090	1.48	1.48	—	—	8.3 [42]	0	0	0
${Nb}_{2} O_{5}$	717	2.23	2.23	3.43	3.46	3.92	1	1	1
${ZrO}_{2}$	759	2.09	2.09	4.67	4.74	5.29	1	1	1
Mixed ${Nb}_{2} O_{5} / {SiO}_{2}$ :
Low/high	939	1.71	1.72	3.87	3.94	4.80	0.386	0.336	0.316
Half/half	838	1.92	1.92	3.70	3.74	4.37	0.664	0.604	0.592
High/low	773	2.07	2.07	3.57	3.61	4.18	0.836	0.794	0.790
Mixed ${ZrO}_{2} / {SiO}_{2}$ :
Low/high	970	1.66	1.66	5.30	5.38	—	0.330	0.292	0.277
Half/half	885	1.81	1.81	5.13	5.18	5.99	0.573	0.523	0.511
High/low	811	1.96	1.96	4.88	4.94	5.61	0.792	0.752	0.748

Sample	A ( $J / {cm}^{2}$ )	B ( $J / {cm}^{2}$ )	C (%)
${Nb}_{2} O_{5} / {SiO}_{2}$ :	$5.44 \pm 0.12$	$0.66 \pm 0.09$	$41.7 \pm 2.5$
${ZrO}_{2} / {SiO}_{2}$ :	$5.03 \pm 0.06$	$1.11 \pm 0.07$	$73.8 \pm 2.4$

Sample	$l_{ph .}$ (nm)	$n_{1064}$	$n_{1030}$	$E_{g C}$ (eV)	$E_{g T}$ (eV)	$E_{g U}$ (eV)	$f_{H (LL)}$	$f_{H (BG)}$	$f_{H (MG)}$
Pure Materials:
Substrate	$1 mm$	1.46	1.46	—	—	$\approx 9$ [41]	—	—	—
${SiO}_{2}$	1090	1.48	1.48	—	—	8.3 [42]	0	0	0
${Nb}_{2} O_{5}$	717	2.23	2.23	3.43	3.46	3.92	1	1	1
${ZrO}_{2}$	759	2.09	2.09	4.67	4.74	5.29	1	1	1
Mixed ${Nb}_{2} O_{5} / {SiO}_{2}$ :
Low/high	939	1.71	1.72	3.87	3.94	4.80	0.386	0.336	0.316
Half/half	838	1.92	1.92	3.70	3.74	4.37	0.664	0.604	0.592
High/low	773	2.07	2.07	3.57	3.61	4.18	0.836	0.794	0.790
Mixed ${ZrO}_{2} / {SiO}_{2}$ :
Low/high	970	1.66	1.66	5.30	5.38	—	0.330	0.292	0.277
Half/half	885	1.81	1.81	5.13	5.18	5.99	0.573	0.523	0.511
High/low	811	1.96	1.96	4.88	4.94	5.61	0.792	0.752	0.748

Sample	A ( $J / {cm}^{2}$ )	B ( $J / {cm}^{2}$ )	C (%)
${Nb}_{2} O_{5} / {SiO}_{2}$ :	$5.44 \pm 0.12$	$0.66 \pm 0.09$	$41.7 \pm 2.5$
${ZrO}_{2} / {SiO}_{2}$ :	$5.03 \pm 0.06$	$1.11 \pm 0.07$	$73.8 \pm 2.4$

Abstract

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Applied Optics