Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Journal Home About Issues in Progress Current Issue All Issues Early Posting Feature Issues

Extreme-ultraviolet-induced oxidation of Mo/Si multilayers

Nicolas Benoit, Sven Schröder, Sergiy Yulin, Torsten Feigl, Angela Duparré, Norbert Kaiser, and Andreas Tünnermann

Not Accessible

Your library or personal account may give you access

Abstract

The extreme-ultraviolet (EUV)-induced oxidation of Mo/Si multilayer mirrors was characterized by several methods: EUV reflectivity, x-ray photoelectron spectroscopy, small-angle x-ray reflectometry, atomic force microscopy, and EUV scattering measurements. Based on the results of the different investigation techniques, an oxidation model was developed to explain the degradation of the mirrors under EUV radiation.

© 2008 Optical Society of America

Full Article  |  PDF Article
More Like This
Low-stress and high-reflectance Mo/Si multilayers for extreme ultraviolet lithography by magnetron sputtering deposition with bias assistance

Bo Yu, Chunshui Jin, Shun Yao, Chun Li, Yu Liu, Feng Zhou, Benyin Guo, Hui Wang, Yao Xie, and Liping Wang
Appl. Opt. 56(26) 7462-7468 (2017)

Design and performance of capping layers for extreme-ultraviolet multilayer mirrors

Saša Bajt, Henry N. Chapman, Nhan Nguyen, Jennifer Alameda, Jeffrey C. Robinson, Michael Malinowski, Eric Gullikson, Andrew Aquila, Charles Tarrio, and Steven Grantham
Appl. Opt. 42(28) 5750-5758 (2003)

Mo/Si and Mo/Be multilayer thin films on Zerodur substrates for extreme-ultraviolet lithography

Paul B. Mirkarimi, Sasa Bajt, and Mark A. Wall
Appl. Opt. 39(10) 1617-1625 (2000)

View More...

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (10)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use