Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Internal stress and optical properties of Nb2O5 thin films deposited by ion-beam sputtering

Not Accessible

Your library or personal account may give you access

Abstract

The influence on the internal stress and optical properties of Nb2O5 thin films with ion-beam energy was investigated. Nb2O5 thin films were deposited on unheated glass substrates by means of ion-beam sputtering with different ion-beam voltage, V b. The refractive index, extinction coefficient, and surface roughness were found to depend on the ion-beam energy. The stresses in thin films were measured by the phase-shifting interferometry technique. The film stress was also found to be related to V b, and a high compressive stress of -0.467 GPa was measured at V b = 850 V. The Nb2O5–SiO2 multilayer coatings had smaller average compressive stress as compared with single-layer Nb2O5 film.

© 2002 Optical Society of America

Full Article  |  PDF Article
More Like This
TiO2-Ta2O5 composite thin films deposited by radio frequency ion-beam sputtering

Cheng-Chung Lee and Chien-Jen Tang
Appl. Opt. 45(36) 9125-9131 (2006)

Mechanical and thermoelastic characteristics of optical thin films deposited by dual ion beam sputtering

Eda Çetinörgü, Bill Baloukas, Oleg Zabeida, Jolanta E. Klemberg-Sapieha, and Ludvik Martinu
Appl. Opt. 48(23) 4536-4544 (2009)

Stress reduction in ion beam sputtered mixed oxide films

B. J. Pond, J. I. DeBar, C. K. Carniglia, and T. Raj
Appl. Opt. 28(14) 2800-2805 (1989)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved