Abstract

A profiling system for on-line and noncontact measurement of superfine surfaces is described. The system uses the principle of a differential interferometer with coaxial interference arms. The measuring head (optical part) of this system is separable and can be installed on machine tools or in existing measuring instruments. It has excellent resistance to vibration and air turbulence; therefore it needs no damper or cover. This system scans sample surfaces to measure a microprofile with a vertical resolution of 0.08 nm rms.

© 2002 Optical Society of America

Development of a laser-scattering-based probe for on-line measurement of surface roughness

Shihua Wang, Yunhui Tian, Cho Jui Tay, and Chenggen Quan
Appl. Opt. 42(7) 1318-1324 (2003)

Surface profile measurement with a scanning differential ac interferometer

G. Makosch and B. Drollinger
Appl. Opt. 23(24) 4544-4553 (1984)

Near-surface atmospheric turbulence profile measuring technology based on an airship-mounted laser communication system

Tong Wang, Xin Zhao, Yansong Song, Junyao Wang, Yusheng Luan, Yang Li, and Shuai Chang
Appl. Opt. 61(2) 439-445 (2022)

Surface profile measurement with a dual-beam optical system

David Y. Lou, A. Martinez, and D. Stanton
Appl. Opt. 23(5) 746-751 (1984)

Prototype results of a phase-shifting interferometer capable of measuring the complex index and profile of a test surface

Eric W. Rogala and Harrison H. Barrett
Appl. Opt. 41(25) 5298-5312 (2002)