Abstract
The performances of a CCD detector have been evaluated in a wide
spectral region, which ranges from the near IR to the soft x
ray. Four different experimental setups have been used: a
Czerny–Turner monochromator for the 1100–250-nm region, a
normal-incidence Johnson–Onaka monochromator for the 250–30-nm
region, a grazing-incidence Rowland monochromator for the 30–0.27-nm
region, and a test facility with broadband filters for the
0.27–0.14-nm region. The CCD is thinned and backilluminated, with
a 512 × 512 format and 24 µm × 24 µm
pixels. The quantum efficiency was measured in the 1100–0.14-nm
(1-eV to 9-keV) region, and the uniformity of response was in the
1100–58-nm (1–21-eV) region. Contamination effects in the
vacuum UV range are also discussed.
© 1999 Optical Society of America
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