Abstract

The influence of birefringence caused by rotationally symmetric stress distribution in a high-resolution projection optical system is investigated. The general form of the pupil function is derived based on the Jones matrix calculation, expressing the wave front as a combination of the two orthogonal polarization components. Assuming a linearly polarized incident beam, it is found that the main polarization portion of the wave front exiting the projection lens has astigmatic aberration in the Seidel region and shows phase singularity at four pupil points at which the amplitude transmittance becomes zero.

© 1998 Optical Society of America

Influence of birefringence on the image formation of high-resolution projection optics

Yasuyuki Unno
Appl. Opt. 39(19) 3243-3252 (2000)

Point-spread function for a rotationally symmetric birefringent lens

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Polarization aberrations. 1. Rotationally symmetric optical systems

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Polarization analyses of aerial images produced by an optical lithography system

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