Abstract
We demonstrate the planar integration of Talbot array illuminators designed to generate one-dimensional spot arrays. The array illuminator basically consists of a phase grating and a cylindrical diffractive lens integrated as a single diffractive optical element onto a transparent glass substrate. We discuss various design aspects, and we focus on problems typical for planar-integrated free-space optics like the tilted optical axis of the system. Experimental results and measurements, which were obtained from planar-integrated setups fabricated as surface-relief structures on a transparent glass substrate by use of standard photolithography, are included.
© 1998 Optical Society of America
Full Article | PDF ArticleMore Like This
Victor Arrizón and G. Rojo-Velázquez
Appl. Opt. 39(26) 4794-4801 (2000)
Werner Klaus, Yoshinori Arimoto, and Kashiko Kodate
Appl. Opt. 37(20) 4357-4365 (1998)
Enrique Tajahuerce, Elvira Bonet, Pedro Andrés, Carlos J. Zapata-Rodríguez, and Vicent Climent
Appl. Opt. 37(20) 4366-4373 (1998)