Abstract
We first discuss an interference microscope’s 3D response in terms
of Richards and Wolf’s vector theory. We then report the results
we obtained with a 325-nm interference microscope using an ultraviolet
transparent beam splitter, short-working-distance Mirau
interferometer. The microscope performs at near-ideal definitions
with a measured FWHM of the intensity spot at 0.14 μm and a
FWHM of the depth envelope intensity at 0.25
μm. Feasibility of a shorter wavelength system operating
at 248 nm is demonstrated.
© 1998 Optical Society of America
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