Abstract

Real-time control by multiwavelength phase-modulated ellipsometry (PME) of the growth of multilayer structures deposited on transparent glass is presented. The structures consist of plasma-deposited SiO₂ and SiN_x stacks. A model that takes into account incoherent reflection in the substrate is described and tested. A generalized feedback control method that incorporates the incoherent modeling of the transparent substrate is further applied to the growth of a Fabry–Perot and a standard quarter-wave filter. The resulting optical coatings characterized by spectroscopic PME and transmission measurements show a reproducible precision, with less than 1% error between target and measured spectral responses.

© 1997 Optical Society of America

Real-Time Monitoring and Growth Control of Si-Gradient-Index Structures by Multiwavelength Ellipsometry

M. Kildemo
Appl. Opt. 37(1) 113-124 (1998)

Anisotropic incoherent reflection model for spectroscopic ellipsometry of a thick semitransparent anisotropic substrate

Razvigor Ossikovski, Morten Kildemo, Michel Stchakovsky, and Marcus Mooney
Appl. Opt. 39(13) 2071-2077 (2000)

Influence of incoherent superposition of light on ellipsometric coefficients

R. Joerger, K. Forcht, A. Gombert, M. Köhl, and W. Graf
Appl. Opt. 36(1) 319-327 (1997)

Approximation of reflection coefficients for rapid real-time calculation of inhomogeneous films

Morten Kildemo, Ola Hunderi, and Bernard Drévillon
J. Opt. Soc. Am. A 14(4) 931-939 (1997)

Direct numerical inversion method for kinetic ellipsometric data. I. Presentation of the method and numerical evaluation

Dmitri Kouznetsov, Alfred Hofrichter, and Bernard Drévillon
Appl. Opt. 41(22) 4510-4518 (2002)