Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Modeling the image quality of enhanced reflectance x-ray multilayers as a surface power spectral density filter function

Not Accessible

Your library or personal account may give you access

Abstract

Residual surface roughness over the entire range of relevant spatial frequencies must be specified and controlled in many high-performance optical systems. This is particularly true for enhanced reflectance multilayers if both high reflectance and high spatial resolution are desired. If we assume that the interfaces making up a multilayer coating are uncorrelated at high spatial frequencies (microroughness) and perfectly correlated at low spatial and midspatial frequencies, then the multilayer can be thought of as a surface power spectral density (PSD) filter function. Multilayer coatings thus behave as a low-pass spatial frequency filter acting on the substrate PSD, with the exact location and shape of this cutoff being material and process dependent. This concept allows us to apply conventional linear systems techniques to the evaluation of image quality and to the derivation of optical fabrication tolerances for applications utilizing enhanced reflectance x-ray multilayers.

© 1995 Optical Society of America

Full Article  |  PDF Article
More Like This
Effects of surface scatter on the optical performance of x-ray synchrotron beam-line mirrors

James E. Harvey, Kristin L. Lewotsky, and Anita Kotha
Appl. Opt. 34(16) 3024-3032 (1995)

Surface finish requirements for soft x-ray mirrors

D. L. Windt, W. K. Waskiewicz, and J. E. Griffith
Appl. Opt. 33(10) 2025-2031 (1994)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (20)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (32)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved