Optical properties and environmental stability of oxide coatings deposited by reactive sputtering

Samad M. Edlou; Ali Smajkiewicz; Ghanim A. Al-Jumaily

doi:10.1364/AO.32.005601

Applied Optics
Vol. 32,
Issue 28,
pp. 5601-5605
(1993)
•https://doi.org/10.1364/AO.32.005601

Optical properties and environmental stability of oxide coatings deposited by reactive sputtering

Samad M. Edlou, Ali Smajkiewicz, and Ghanim A. Al-Jumaily

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Samad M. Edlou, Ali Smajkiewicz, and Ghanim A. Al-Jumaily, "Optical properties and environmental stability of oxide coatings deposited by reactive sputtering," Appl. Opt. 32, 5601-5605 (1993)

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Abstract

Refractory metal-oxide coatings are deposited by reactive dc magnetron sputtering in an oxygen environment. The optical constants and the environmental stability of silicon oxide, aluminium oxide, hafnium oxide, zirconium oxide, tantalum oxide, titanium oxide, and a blend of hafnium oxide with silicon oxide are investigated. Properties of both single-layer and multilayer interference filters are examined.

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Wavelength (nm)	SiO₂		Al₂O₃		[Hf_xSi₁₋_x]O₂		HfO₂		ZrO₂		Ta₂O₅		TiO₂

	n	k × 10⁻⁴	n	k × 10⁻⁴	n	k × 10⁻⁴	n	k × 10⁻⁴	n	k × 10⁻⁴	n	k × 10⁻⁴	n	k × 10⁻⁴
200	1.50	0.00	1.83	29.10	2.13	78.00	2.51	152.0	—	—	—	—	—	—
220	1.47	0.00	1.74	23.40	2.07	50.60	2.38	99.98	—	—	—	—	—	—
300	1.47	0.00	1.70	11.90	1.99	9.80	2.12	33.70	2.32	37.00	2.38	45.55	—	—
400	1.46	0.00	1.65	3.70	1.90	4.40	2.05	12.30	2.21	23.63	2.26	5.30	2.70	21.62
500	1.46	0.00	1.65	1.70	1.91	1.00	2.02	8.90	2.17	7.64	2.20	2.45	2.45	5.24
600	1.45	0.00	1.65	0.00	1.89	1.00	2.01	8.30	2.15	1.55	2.15	0.99	2.35	1.36
700	1.45	0.00	1.65	0.00	1.88	0.00	2.00	6.90	2.14	0.00	2.14	0.00	2.34	0.00
800	1.45	0.00	1.64	0.00	1.87	0.00	1.99	7.80	2.14	0.00	2.13	0.00	2.32	0.00
900	1.44	0.00	1.64	0.00	1.86	0.00	1.99	0.00	2.13	0.00	2.12	0.00	2.30	0.00
1000	1.44	0.00	1.64	0.00	1.86	0.00	1.98	0.00	2.12	0.00	2.11	0.00	2.30	0.00
1100	1.44	0.00	1.63	0.00	1.86	0.00	1.98	0.00	2.12	0.00	2.11	0.00	2.28	0.00
1200	1.44	0.00	1.63	0.00	1.86	0.00	1.97	0.00	2.12	0.00	2.11	0.00	2.28	0.00

Material	A	B × 10³ (nm)²	C × 10⁷ (nm)⁴
Al₂O₃	1.63	2.25	20.16
[Hf_xSi₁₋_x]O₂	1.85	11.37	1.29
HfO₂	1.98	6.27	61.20
Ta₂O₅	2.08	31.23	−30.74
ZrO₂	2.11	14.30	39.60
TiO₂	2.30	1.58	974.40

Wavelength (nm)	SiO₂		Al₂O₃		[Hf_xSi₁₋_x]O₂		HfO₂		ZrO₂		Ta₂O₅		TiO₂

	n	k × 10⁻⁴	n	k × 10⁻⁴	n	k × 10⁻⁴	n	k × 10⁻⁴	n	k × 10⁻⁴	n	k × 10⁻⁴	n	k × 10⁻⁴
200	1.50	0.00	1.83	29.10	2.13	78.00	2.51	152.0	—	—	—	—	—	—
220	1.47	0.00	1.74	23.40	2.07	50.60	2.38	99.98	—	—	—	—	—	—
300	1.47	0.00	1.70	11.90	1.99	9.80	2.12	33.70	2.32	37.00	2.38	45.55	—	—
400	1.46	0.00	1.65	3.70	1.90	4.40	2.05	12.30	2.21	23.63	2.26	5.30	2.70	21.62
500	1.46	0.00	1.65	1.70	1.91	1.00	2.02	8.90	2.17	7.64	2.20	2.45	2.45	5.24
600	1.45	0.00	1.65	0.00	1.89	1.00	2.01	8.30	2.15	1.55	2.15	0.99	2.35	1.36
700	1.45	0.00	1.65	0.00	1.88	0.00	2.00	6.90	2.14	0.00	2.14	0.00	2.34	0.00
800	1.45	0.00	1.64	0.00	1.87	0.00	1.99	7.80	2.14	0.00	2.13	0.00	2.32	0.00
900	1.44	0.00	1.64	0.00	1.86	0.00	1.99	0.00	2.13	0.00	2.12	0.00	2.30	0.00
1000	1.44	0.00	1.64	0.00	1.86	0.00	1.98	0.00	2.12	0.00	2.11	0.00	2.30	0.00
1100	1.44	0.00	1.63	0.00	1.86	0.00	1.98	0.00	2.12	0.00	2.11	0.00	2.28	0.00
1200	1.44	0.00	1.63	0.00	1.86	0.00	1.97	0.00	2.12	0.00	2.11	0.00	2.28	0.00

Material	A	B × 10³ (nm)²	C × 10⁷ (nm)⁴
Al₂O₃	1.63	2.25	20.16
[Hf_xSi₁₋_x]O₂	1.85	11.37	1.29
HfO₂	1.98	6.27	61.20
Ta₂O₅	2.08	31.23	−30.74
ZrO₂	2.11	14.30	39.60
TiO₂	2.30	1.58	974.40

Abstract

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Tables (2)

Equations (3)

Applied Optics