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Broadband AR coatings on germanium substrates using ion-assisted deposition

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Abstract

A series of five broadband antireflection coatings on germanium substrates was deposited with or without ion-assisted deposition at a substrate temperature of 220°C. Measurements of laser-damage threshold for 10.6-μm 0.1-μs pulses were made on these coatings. Germanium films deposited under simultaneous argon-ion bombardments show higher laser-damage threshold and substantially better durability of the AR coatings on the germanium substrates.

© 1988 Optical Society of America

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