Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Optical constants for thin films of Ti, Zr, Nb, Mo, Ru, Rh, Pd, Ag, Hf, Ta, W, Re, Ir, Os, Pt, and Au from 24 Å to 1216 Å

Not Accessible

Your library or personal account may give you access

Abstract

Reflectance vs incidence angle measurements have been performed from 24 Å to 1216 Å on electron-beam evaporated samples of Ti, Zr, Nb, Mo, Ru, Rh, Pd, Ag, Hf, Ta, W, Re, Os, Ir, Pt, and Au, and using a nonlinear least-squares curve-fitting technique, the optical constants have been determined. Independently measured values of the incident beam polarization, film thicknesses, and film surface roughnesses are incorporated into the derivation of the optical constants. Additionally, Auger electron spectroscopy depth profiling measurements have been performed on each sample to characterize sample composition including oxidation and contamination.

© 1988 Optical Society of America

Full Article  |  PDF Article
More Like This
Optical constants for thin films of C, diamond, Al, Si, and CVD SiC from 24 Å to 1216 Å

David L. Windt, Webster C. Cash, M. Scott, P. Arendt, Brian Newnam, R. F. Fisher, A. B. Swartzlander, P. Z. Takacs, and J. M. Pinneo
Appl. Opt. 27(2) 279-295 (1988)

Amorphous silicon carbide coatings for extreme ultraviolet optics

J. B. Kortright and David L. Windt
Appl. Opt. 27(14) 2841-2846 (1988)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (48)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (16)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved