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Optimization of layered synthetic microstructures for broadband reflectivity at soft x-ray and EUV wavelengths

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Abstract

A technique is described which allows the thickness of each layer in a layered synthetic microstructure to yield a useful constant efficiency over a broad band of wavelengths, several hundred angstroms wide, in the soft x-ray and EUV wavebands.

© 1987 Optical Society of America

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