Abstract

A new algorithm is described for numerical inversion of the equations T_exp = T(n,k) and R_exp = R(n,k), where T_exp and R_exp are measured normal-incidence transmission and reflection of a thin film on a thick substrate, and n + ik is the complex index of refraction of the thin film. The procedure simultaneously provides all pairs (n,k) consistent with the values of (T,R) measured at a specific wavelength and known film thickness. It requires no initial estimates for n and k.

© 1986 Optical Society of America

Derivation of Optical Constants of Metals from Thin-Film Measurements at Oblique Incidence

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