Abstract

Shearing heterodyne interferometry systems with ultrasonic light modulators and/or a grating are presented. Various types of optical configuration and signal processing technique are discussed. Some experimental results with interferometric measurements of specular surface shape, deformation, and vibration amplitude are also presented. Applications of the interferometers are discussed, and preliminary experimental results of a scanning differential microscope and position sensing are reviewed.

© 1985 Optical Society of America

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