Abstract

A holographic matched filtering technique is used to control the contour shape of small mechanical elements. The optimization of the spatial filter leads to a well-defined response curve which is used to calibrate the output of the optical correlator in terms of shape error. It is shown that the techniques of computer holograms offer the widest possibilities to perform this optimization. The basis of the technique is presented together with a few simple examples showing the possibility of detecting shape errors of a few microns (less than 1% of the controlled dimension).

© 1976 Optical Society of America

Application of optical processing techniques to the quality control of micromechanics

G. Indebetouw
Appl. Opt. 16(7) 1944-1950 (1977)

Optical processing techniques in the quality control of micromechanics

G. Indebetouw, T. Tschudi, and J. Steffen
Appl. Opt. 17(6) 911-916 (1978)

Cross-correlation discrimination for optical cavity modes

C. C. Aleksoff and B. D. Guenther
Appl. Opt. 15(1) 206-217 (1976)

Water pollution monitoring using matched spatial filters

Silverio P. Almeida and James Kim-Tzong Eu
Appl. Opt. 15(2) 510-515 (1976)

Lensless matched filter: operating principle, sensitivity to spectrum shift, and third-order holographic aberrations

Marc J. Bage and Michael P. Beddoes
Appl. Opt. 15(11) 2830-2839 (1976)