Abstract

For the utilization of photoresist materials it is desirable to describe quantitatively the photoresist image and thereby introduce control over photoresist processing. The photoresist AZ111 has been shown to be a linear image recording medium and a modulation transfer function (MTF) defined and measured. Measured and calculated image profiles in this resist are quite comparable.

© 1971 Optical Society of America

Modulation transfer function evaluation of linear solid-state x-ray-sensitive detectors using edge techniques

Yue Min Zhu, Valérie Kaftandjian, Gilles Peix, and Daniel Babot
Appl. Opt. 34(22) 4937-4943 (1995)

Method for the measurement of the modulation transfer function of sampled imaging systems from bar-target patterns

David N. Sitter, James S. Goddard, and Regina K. Ferrell
Appl. Opt. 34(4) 746-751 (1995)

Atmospheric modulation transfer function in the infrared

Kobi Buskila, Shay Towito, Elad Shmuel, Ran Levi, Natan Kopeika, Keith Krapels, Ronald G. Driggers, Richard H. Vollmerhausen, and Carl E. Halford
Appl. Opt. 43(2) 471-482 (2004)

Modulation transfer function measurement technique for small-pixel detectors

Mike Marchywka and Dennis G. Socker
Appl. Opt. 31(34) 7198-7213 (1992)

Modeling imager deterministic and statistical modulation transfer functions

Jerris F. Johnson
Appl. Opt. 32(32) 6503-6513 (1993)