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Abstract
We propose two tunable metareflectors (MRs) composed of a suspending nanodisk and an annular hole on silicon (Si) substrate with aluminum (Al) mirrors atop. They are denoted as MR-1 and MR-2 for the former and latter, respectively. The proposed MRs exhibit high-efficient cyan-magenta-yellow (CMY) color filtering, and ultrabroad tuning range characteristics. The electromagnetic energy of the resonant wavelength is confined within the suspending nanostructure and bottom Al mirror and then performed a perfect absorption. By changing the height between suspending nanostructure and the bottom Al mirror, MRs exhibit active tuning and single-/dual-resonance switching characteristics spanning the entire visible spectra range. Furthermore, the resonant wavelengths of MRs are sensitive to the surrounding ambient media, which are red-shifted and modulated from single- to dual-resonance by changing the environmental refraction index. The corresponding sensitivities are 500 nm/RIU and 360 nm/RIU for MR-1, 289 nm/RIU and 270 nm/RIU for MR-2, respectively. These results provide an effective strategy for use in high-resolution displays, high-sensitive sensors, optical switches, optical communications, and flexible virtual reality (VR)/augmented reality (AR) applications.
© 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
1. Introduction
Metamaterial is an artificial material that possesses extraordinary electromagnetic properties, which have attracted great attention over the past few decades [1,2]. These optical properties are included but not limited to the negative refraction index, invisibility cloak, subwavelength light confinement, artificial magnetism, and toroidal response [3–13]. Recently, the manipulation methods of the electromagnetic wave have been intensively studied by utilizing the subwavelength nanostructures. Among these methods, subwavelength plasmonic nanostructures are used to demonstrate the color filtering and generation characteristics [14–19], which show great potentials in displays [20–21], energy harvesting [22], holography [23–25], and sensing applications [26,27]. There have been many literature reports to demonstrate the color filters with high transmission efficiency and color saturation characteristics according to the physical theories of surface plasmon polarization (SPP) [19], Fabry-Perot resonance [25,26], Mie resonance [28,29], and guided-mode resonance (GMR) [30–32]. These nanostructures could be patterned as grating [31], nanorod [32], nanohole [33], annular-hole [34–36], and metal-insulator-metal (MIM) based configurations [26,32].
Among these configurations, MIM-based color filter shows high subtraction color characteristic attributed to the composition of the optically transparent dielectric layer and metal mirror, which provides an excellent prospect in sensing, display, holography, and imaging applications [26,32,37,38]. To follow up the principle of SPP for the design of suspension nanostructure, the electromagnetic wave could be completely transmitted through the medium, and then exhibits zero reflectance. It also shows zero transmittance if the bottom MIM layer is thick enough that the electromagnetic wave cannot be penetrated. The absorption is expressed as A=1 – R – T. The design of MIM configuration makes high absorption as possible. By adjusting the dielectric layer thickness of MIM configuration, the resonant wavelength could be performed narrow bandwidth and high optical intensity spanned the entire visible spectrum. This kind of MIM-based color filter can obtain complementary cyan-magenta-yellow (CMY) colors. Moreover, it shows high transmission efficiency, color saturation, and lower color crosstalk characteristics [32,39]. The method of changing color was proposed by using phase change materials in MIM configuration [40]. However, the above-mentioned MIM-based color filters are limited to control the electromagnetic wave by directly changing the period and geometry, which lacks of the active manipulation mechanism to make color filters more flexible and applicable in the widespread optoelectronics applications.
In this study, we propose two actively tunable metareflectors (MRs) for color filters, which are denoted as MR-1 and MR-2, respectively. MR-1 is composed of a suspended nanodisk on silicon (Si) substrate with an aluminum (Al) mirror atop. While MR-2 is composed of a suspended annular hole on Si substrate with an Al mirror atop. These two MRs indicate CMY color filtering performance and broad tuning range of the resonant wavelength. By actively changing the position of suspension layer along z-axis direction, MR-1 exhibits an ultrabroad tuning range of the perfect absorption spectrum in the entire visible spectra range and MR-2 shows a switching function between single- and dual-resonance. Furthermore, MRs exhibit a polarization independence characteristic. By changing the incident angle, MRs possess incident angle-sensitive characteristic. To increase the flexibility and applicability of proposed MRs, they are exposed on the surrounding ambient with different refraction indexes. The perfect absorptions of both MRs are red-shifted and changed from single-resonance to dual-resonance. The above electromagnetic characteristics of MRs provide a strategy for the uses in high-resolution display, high-sensitive sensor, and flexible virtual reality (VR)/augmented reality (AR) applications.
2. Designs and methods
The schematic diagrams of proposed tunable MR-1 and MR-2 are shown in Fig. 1(a) and (b), respectively. The thicknesses of suspended Al nanodisk of MR-1 and Al annular hole of MR-2 are 60 nm. While the thicknesses of bottom Al mirror layers are 90 nm. The configurations of MRs unit cells are illustrated in Fig. 1(c) and (d), respectively. The period is defined as P. The diameters of nanodisk (D1) and annular hole (D2) are 240 nm and 180 nm, respectively. The inner diameter of annular hole (d) of MR-2 is 100 nm. The initial gaps between suspended nanodisk (g1) and annular hole (g2) are 230 nm and 150 nm, respectively.
Fig. 1. Schematic drawings of (a) MR-1 and (b) MR-2. (c) and (d) are the cross-sectional views and corresponding geometrical denotations of (a) and (b), respectively.
3. Results and discussions
To explore and compare the electromagnetic responses of MR-1 and MR-2, Fig. 2 shows the reflection spectra of MR-1 with different D1 values and MR-2 with different d and D2 values. Here, g1 and g2 parameters are set as 230 nm and 150 nm, respectively. The refraction index (n) of surrounding ambient medium is 1.0, i.e., n = 1.0. P value is kept as constant as 300 nm. By increasing D1 value from 40 nm to 240 nm, the resonant wavelength is red-shifted and shows narrower absorption bandwidth as shown in Fig. 2(a). It results in the enhancement of absorption intensity. When D1 value continuously increases to 280 nm, most of the incident light is reflected by the suspended Al nanodisk and then the localized electric (E) field energy decreases in the dielectric layer. The reflection is increased and the corresponding absorption is decreased. When d value of MR-2 increases from 0 nm to 140 nm while D2 is kept as constant as 180 nm, the resonant wavelength is red-shifted from 420 nm to 700 nm as shown in Fig. 2(b). Figure 2(c) indicates the reflection spectra of MR-2 with d = 100 nm. The resonant wavelengths are red-shifted with a reduction in reflection intensity and broadened by increasing D2 value from 160 nm to 280 nm.
Fig. 2. Reflection spectra of (a) MR-1 with different D1 values, (b) MR-2 with different d values, and (c) MR-2 with different D2 values. P value is kept as constant as 300 × 300 nm2.
Figure 3(a) and (b) show the reflection spectra of MR-1 and MR-2 with different P values under the conditions of n = 1.0, g1 = 230 nm for MR-1, and g2 = 150 nm for MR-2, respectively. The ratios of P values and diameters of Al suspended layers are kept as constants as R1 = D1/P = 0.8, R2 = D2/P = 0.6, and R3 = d/P = 1/3. Therefore, D1, D2, and d values will be changed correspondingly by increasing P value and then resulting in a red-shift of the resonant wavelength. MR-1 shows the enhancement of resonant intensity and a perfect absorption under the conditions of P = 250 nm and P = 300 nm. MR-2 exhibits perfect absorption with a tuning range of 210 nm from the resonant wavelength of 430 nm to 640 nm. Although the changes of P, D1, d, and D2 parameters can result in the differences of resonant wavelengths, these parameters are fixed when they are fabricated on the rigid substrates. To actively tune and control the resonant wavelength, the initial gaps between suspended nanodisk (g1) and annular hole (g2) along the z-axis direction should be designed to have the ability to change. The reflection spectra of MR-1 with different g1 values are shown in Fig. 4(a). It indicates that there is only single resonant wavelength red-shifted in the entire visible spectrum by changing g1 value from 150 nm to 390 nm. It reveals an ultrabroad tuning range and monochrome conversion between three CMY colors. Figure 4(b) shows the reflection spectra of MR-2 by increasing g2 value from 30 nm to 280 nm. It shows a single- (λ1) to dual-resonance (λ1, λ2) switching characteristic. The first resonance (λ1) is red-shifted with a tuning range of 150 nm from the wavelength of 475 nm to 625 nm. The second resonance (λ2) appears when g2 value is larger than 180 nm with a tuning range of 95 nm from the wavelength of 380 nm to 475 nm. This tuning characteristic provides an effective method for actively tunable resonant wavelength in the entire visible spectrum. The CIE 1931 chromaticity of MR-1 and MR-2 with different g1 and g2 values are plotted in Fig. 4(c) and (d), respectively. Both of them show the CMY complementary color filtering characteristic in the visible spectrum while MR-2 shows a wider color gamut.
Fig. 4. Reflection spectra of (a) MR-1 and (b) MR-2 with different g1 and g2 values for MR-1 and MR-2, respectively. P value is kept as constant as 300 × 300 nm2. (c) and (d) are the CIE 1931 chromaticity of MR-1 and MR-2, respectively.
By tailoring the geometric parameters of suspended Al nanodisk, the zero reflectance can be realized. The transmittance is zero for the existence of the bottom Al mirror. Therefore, the electromagnetic wave will be continuously reflected in the dielectric layer between the suspended layer and bottom mirror, resulting in the conversion of electromagnetic wave energy and heat. By reducing the transmission and reflection of electromagnetic waves, the absorption (A = 1 – R – T) can be made as large as possible and then performed the perfect absorption. However, the annular hole will generate local surface plasmonic (LSP) resonance, which will enhance the local electromagnetic field between metals, and then make the electromagnetic wave energy better confined in the dielectric layer. Therefore, it can achieve better absorption performance.
The physical mechanism of the proposed MRs could be explained by the reflection spectra and the corresponding E-field distributions plotted in Fig. 5 under the conditions of n = 1.0, g1 = g2 = 230 nm and P = 300 × 300 nm2. The resonances of MR-1 and MR-2 are at the wavelength of 485 nm for MR-1, and the wavelengths of 450 nm and 576 nm for MR-2, respectively as shown in Fig. 5(a). The E-field energies of both MRs are confined between the top suspended layers and bottom Al mirrors as shown in Fig. 5(b-d). As shown in Fig. 5(b), the incident light of MR-1 is effectively confined in the dielectric layer at the wavelength of 485 nm. This absorption resonance is contributed by the local surface plasmon (LSP) intrinsic resonance at the interface of Al and air, which converts the energy of incident light into heat energy and then achieves perfect absorption. Hence, it confines the energy in the medium layer. The corresponding resonant wavelength is red-shifted by increasing g1 value. For MR-2, the absorption resonance at the wavelength of 576 nm is contributed by the LSP intrinsic dipole resonance at the interface of Al and air, which is similar to that of MR-1 as shown in Fig. 5(d). While the absorption resonance at the wavelength of 450 nm is generated by the LSP resonance between the annual holes as shown in Fig. 5(c). The resonant wavelength is red-shifted owing to the LSP caused by the geometrical size of annular hole and the change of g2 value. Although the tuning range of resonant wavelength of MR-2 is not large compared to that of MR-1, but MR-2 exhibits the switching characteristic from single- to dual-resonance to possess potential applications in the visible light communication and optical switching fields.
Fig. 5. (a) Reflection spectra of MR-1 and MR-2 under the conditions of g1 = g2 = 230 nm and P = 300 × 300 nm2. The corresponding E-field distributions of resonances at the wavelengths of (b) 485 nm for MR-1, (c) 450 nm, and (d) 576 nm for MR-2.
To evaluate the influence of the incident angle of light on the proposed MRs, Fig. 6(a) and (b) show the reflection spectra of MRs with different incident angles (θ) under the condition of n = 1.0, P = 300 nm, and g1 = g2 = 230 nm. According to the previous discussions, the resonant wavelength is mainly determined by the geometrical size rather than the incident angle of light. The resonant wavelength is kept as stable along with the change of incident angle. However, when the incident angle is too large, it will induce other resonant wavelength to scatter into the structure and reflect continuously, which will broaden the absorption bandwidth and lead to unstable absorption resonance. When θ value changes from normal incidence (θ = 0°) to θ = 40°, MR-1 keeps perfect absorption at the wavelength of 460 nm, and the reflection intensity of other wavelengths are larger than 0.6. It provides the possibility of application in visible light communication. For MR-2, the reflection intensity is kept as higher than 0.6 for the maximum incident angle of θ = 30°.
Fig. 6. Reflection spectra of (a) MR-1 and (2) MR-2 with different incident angles, respectively. P value is kept as constant as 300 × 300 nm2.
In this study, the proposed tunable MRs show tunable resonance characteristic which could be realized by using MEMS technique [17–19,19]. The corresponding fabrication process of MRs using MEMS technique is illustrated in Fig. 7. Herein, we take MR-2 as an example to describe the fabrication process and its mechanism. First, the bottom Al thin-film with 90 nm in thickness is deposited and patterned by using evaporator and lift-off processes as shown in Fig. 7(a). Second, a SiO2 thin-film with 500 nm in thickness is deposited and patterned by using plasma enhanced chemical vapor deposition (PECVD) and reactive ion etching (RIE) processes sequentially as shown in Fig. 7(b). Third, the top Al thin-film with 60 nm in thickness is deposited and patterned by using evaporator and lift-off processes as shown in Fig. 7(c). Forth, the nanostructures are released by using vapor HF (VHF) as shown in Fig. 7(d). Figure 7(e) shows the denotations of MR-2 derived by MEMS actuation force, such as electrostatic force to perform the vertical tuning to change the gap between bottom and top Al layers. The driving voltage is applied on the Al electrodes. In the future, we will design and demonstrate the reconfigurable MR-2 by using MEMS technique and following up this fabrication process. Such reconfigurable MR-2 possesses flexibility and applicability which could be used in widespread applications with active tunability in the visible spectrum, such as high-resolution display, optical sensor, and adaptive device.
Fig. 7. Fabrication process flow of proposed MR-2 using MEMS technique. (a) The bottom Al thin-film with 90 nm in thickness is deposited and patterned by using lift-off process. (b) A SiO2 thin-film with 500 nm in thickness is deposited and patterned by using PECVD and RIE processes sequentially. (c) The top Al thin-film with 60 nm in thickness is deposited and patterned by using lift-off process. (d) The nanostructures are released by using VHF. (e) The denotations of MR-2. The driving voltage is applied on the Al electrodes.
To further investigate the proposed MRs for practical applications, MR-1 and MTR-2 are exposed on surrounding ambient with different n values. The refection spectra are shown in Fig. 8 under the conditions of g1 = 230 nm, g2 = 150 nm, P = 300 nm, D1 = 240 nm, d = 100nm, D2 = 180nm, and θ = 90°, respectively. The resonant wavelengths of MRs are red-shifted with a color switching characteristic. The resonances can be changed from single- to dual-resonance. The trend between resonances and n values is quite linear. It means that the environmental n values could be measured more accurately by simultaneously confirming two resonances, which shows a great potential in environmental sensor, biosensor, and gas sensor applications. Therefore, we investigate the sensitivity (S) between n value and resonance. S value could be calculated using Eq. (3) [41–45].
In Fig. 8(a), the first resonance (λ1) of MR-1 is red-shifted from 480 nm to 780 nm by increasing n value from 1.0 to 1.6 while the tuning range of second resonance (λ2) is 245 nm by changing n value from 1.2 to 2.0. The corresponding sensitivities of MR-1 are about 500 nm/RIU and 306 nm/RIU for λ1 and λ2, respectively. The reflection spectra of MR-2 with different n values are illustrated in Fig. 8(b). The first resonance (λ1) of MR-2 shows a resonant shift, which exhibits sensitivity value of 289 nm/RIU. The second resonance (λ2) is red-shifted from 380 nm to 610 nm by increasing n value from 1.15 to 2.0. The sensitivity value of λ2 is 270 nm/RIU. The CIE 1931 chromaticity of MR-1 and MR-2 with the change of n value are shown in Fig. 8(c) and (d). Both of them show the CMY complementary color filtering characteristic in the visible spectrum. These results show that such superior characteristics of the proposed MRs are capable for environmental sensor, with high sensitivity and high measurement accuracy in the whole visible spectrum.
Fig. 8. Reflection spectra of (a) MR-1 and (b) MR-2 exposed on surrounding environment with different refractive indexes (n values). (c) and (d) are the CIE 1931 chromaticity of MR-1 and MR-2, respectively.
4. Conclusion
In conclusion, two designs of actively tunable MRs are proposed for broadband modulation. By tailoring the structure and geometrical parameters of suspended layer, the incident light can be confined in the medium between the suspended layer and bottom metal mirror and then resulted in the appearance of perfect absorption. It makes MRs possess the reflective CMY color filtering characteristic. MRs are polarization independent with a manifest actively tuning characteristic in the entire visible spectrum. By actively changing the initial gap sizes, the perfect absorption of MR-1 is continuously red-shifted from the wavelength of 380 nm to 780 nm. However, the generated LSP resonance of the annual hole resulting a better performance which shows the switching characteristic from single- to dual-resonance and broadband tuning range. These characteristics provide an effective method to be used in optical switch and optical communication applications. To provide more functions and flexibilities, the electromagnetic responses are investigated by changing the environmental n values. By increasing n value, the perfect absorptions of MRs are red-shifted. The corresponding highest sensitivities are 500 nm/RIU for MR-1 and 289 nm/RIU for MR-2. These excellent performances of proposed MRs provide a strategy to actively tuning the reflective colors and precisely environmental sensing, which can be served in high-resolution display, high-sensitive sensor, optical switch, optical comminutions, and flexible virtual reality (VR)/augmented reality (AR) applications.
Funding
National Natural Science Foundation of China (11690031); National Key Research and Development Program of China (2019YFA0705004); Natural Science Foundation of Basic and Applied Foundation of Guangdong Province (2021A1515012217).
Acknowledgments
The authors acknowledge the State Key Laboratory of Optoelectronic Materials and Technologies of Sun Yat-Sen University for the use of experimental equipment.
Disclosures
The authors declare no conflicts of interest.
Data availability
Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.
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