Abstract
We describe the fabrication of a Mach–Zehnder optical modulator in by femtosecond laser micromachining, which is composed of optical waveguides inscripted by a femtosecond laser and embedded microelectrodes subsequently fabricated using femtosecond laser ablation and selective electroless plating. A half-wave voltage close to is achieved at a wavelength of with an interaction length of . This simple and cost-effective technique opens up new opportunities for fabricating integrated electro-optic devices.
© 2008 Optical Society of America
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