Abstract
We present a new interferometer system devised for surface-profile metrology with multiple two-point-diffraction sources that are made from a pair of single-mode optical fibers. The diffraction interferometer system performs an absolute profile measurement by projecting multiple fringe patterns on the object surface and then fitting the measured phase data into a global model of multilateration. Test measurement results demonstrate that the proposed profiling method is suited for rough surfaces with excessive surface irregularities, which are difficult to measure with conventional two-arm interferometers.
© 2003 Optical Society of America
Full Article | PDF ArticleMore Like This
José A. Ferrari, Eugenio Garbusi, and Erna M. Frins
Opt. Lett. 28(16) 1454-1456 (2003)
T. Shirai, T. H. Barnes, and T. G. Haskel
Opt. Lett. 24(5) 297-299 (1999)
D. Yelin, B. E. Bouma, N. Iftimia, and G. J. Tearney
Opt. Lett. 28(23) 2321-2323 (2003)