Abstract

A multichannel ellipsometer in the dual-rotating-compensator configuration has been developed for potential applications in real-time Mueller matrix spectroscopy of anisotropic surfaces and films. This instrument provides spectra (1.7–5.3 eV) in all 16 elements of the unnormalized Mueller matrix $\mathbf{M}$ of a film–substrate system with a minimum overall data acquisition time of $t_a=0.25 \mathrm{s}$. We have applied this instrument first for high-precision determination of spectra in $\mathbf{M}$ with $t_a=2.5 \mathrm{s}$ for a microscopically sculptured film.

© 2000 Optical Society of America

Dual rotating-compensator multichannel ellipsometer: instrument design for real-time Mueller matrix spectroscopy of surfaces and films

R. W. Collins and Joohyun Koh
J. Opt. Soc. Am. A 16(8) 1997-2006 (1999)

Real-time characterization of film growth on transparent substrates by rotating-compensator multichannel ellipsometry

Joungchel Lee and Robert W. Collins
Appl. Opt. 37(19) 4230-4238 (1998)

Mueller matrix imaging microscope using dual continuously rotating anisotropic mirrors

Alexander Ruder, Brandon Wright, Rene Feder, Ufuk Kilic, Matthew Hilfiker, Eva Schubert, Craig M. Herzinger, and Mathias Schubert
Opt. Express 29(18) 28704-28724 (2021)

Systematic errors for a Mueller matrix dual rotating compensator ellipsometer

Laurent Broch, Aotmane En Naciri, and Luc Johann
Opt. Express 16(12) 8814-8824 (2008)

Multichannel transmission ellipsometer for characterization of anisotropic optical materials

R. A. Yarussi, A. R. Heyd, H. V. Nguyen, and R. W. Collins
J. Opt. Soc. Am. A 11(8) 2320-2330 (1994)