Abstract
The polarization of light scattered by silicon with a small degree of microroughness was measured out of the plane of incidence. First-order vector perturbation theory for scattering from a rough surface predicts the behavior well. The data and the theory show Brewster-like angles where scattering from surface microroughness vanishes, as well as a deterministic polarization in other directions.
© 1997 Optical Society of America
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