Modified Shack-Hartmann Method for Mirror Surface Monitoring

D. Lyakhov; I. Kozlov; A. Tikhonravov

doi:10.1364/OIC.2013.ThC.6

Optical Interference Coatings
OSA Technical Digest (online) (Optica Publishing Group, 2013),
paper ThC.6
•https://doi.org/10.1364/OIC.2013.ThC.6

Modified Shack-Hartmann Method for Mirror Surface Monitoring

D. Lyakhov, I. Kozlov, and A. Tikhonravov

Optical Interference Coatings 2013

Whistler Canada
16–21 June 2013
ISBN: 978-1-55752-970-1

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Characterization: Measurement Problem (ThC)

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D. Lyakhov, I. Kozlov, and A. Tikhonravov, "Modified Shack-Hartmann Method for Mirror Surface Monitoring," in Optical Interference Coatings, M. Tilsch and D. Ristau, eds., OSA Technical Digest (online) (Optica Publishing Group, 2013), paper ThC.6.

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Abstract

The presented modified Shack-Hartmann method constructing a simple measurement scheme for wavefront reconstruction. It can be used for mirror surface quality monitoring and for investigating dynamic phenomenon causing mirror surface variations.

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