Abstract
ITO films are suitable to achieve transparent and conductive thin films for a multiplicity of applications. Electrical and optical properties of ITO films prepared by plasma ion-assisted deposition at low substrate temperatures will be presented.
© 2007 Optical Society of America
PDF ArticleMore Like This
S. Laux, N. Kaiser, A. Zöller, R. Götzelmann, H. Lauth, and H. Bernitzki
TuC.2 Optical Interference Coatings (OIC) 1998
Jue Wang, Robert L. Maier, and Horst Schreiber
TuA5 Optical Interference Coatings (OIC) 2007
Konstantina Kostourou, Volker Scheuer, and Daniel Kopf
TD.9 Optical Interference Coatings (OIC) 2022