Abstract
Successful rugate filter fabrication has been best obtained using processes which employ sophisticated process control techniques. Fundamental limitations on aperture area which directly affect manufacturing throughput are imposed by strong geometric dependencies of current processes. A Plasma Enhanced Chemical Vapor Deposition (PECVD) process, without these limitations ,was developed to fabricate rugate filters. Application of this process to solar cells, is discussed.
© 1995 Optical Society of America
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