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Conferences > OFC > 2024 > Th3H > Th3H.2

Latest Progress and Challenges in 300 mm Monolithic Silicon Photonics Manufacturing

Takako Hirokawa, Yusheng Bian, Ken Giewont, Abdelsalam Aboketaf, Sujith Chandran, Jae-Kyu Cho, Zahidur Chowdhury, Won Suk Lee, Qidi Liu, Prateek Sharma, Massimo Sorbara, Frederick G. Anderson, Farid Barakat, Arpan Dasgupta, Kevin Dezfulian, Thomas Houghton, Jason Kim, Yarong Lin, Norman Robson, Vaibhav Ruparelia, Shenghua Song, Ryan Sporer, Teck-Jung Tang, Janet Tinkler, Helen Wong, and Michelle Zhang

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Abstract

In this paper we discuss the latest developments in the GlobalFoundries Fotonix™ program, including enhancements in device performance, packaging, PDK compact models, and in-house test capabilities.

© 2024 The Author(s)

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