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Conferences > OFC > 2024 > Th1A > Th1A.7

1 x 5 MEMS Mode Selective Switch with an Inverse-Designed Silicon Nitride MDM

Julian L. Pita Ruiz, Almur A. S. Rabih, Seyedfakhreddin Nabavi, Frederic Nabki, and Michaël Ménard

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Abstract

We present the first experimental demonstration of an inverse-designed 5-mode division multiplexer (MDM) in silicon nitride for MEMS-based inter-chip switches. The MDM exhibits high efficiency, wide bandwidth, compactness, robust fabrication, and compatibility with commercial foundry production.

© 2024 The Author(s)

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