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Toward large-scale nonvolatile electrical programmable photonics with deterministic multilevel operation

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Abstract

We present a deterministic multi-level scheme by electrically controlling multiple phase-change material (PCM) Sb2S3 segments through individual PIN heaters. PCMs are integrated on 300-mm silicon photonic fab dies back-end-of-line, promising for fast-prototyping and massive production.

© 2024 The Author(s)

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