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High-Performance Thin-Film Lithium Niobate Mach-Zehnder Modulator on 8-Inch Silicon Substrate

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Abstract

We first report the thin-film lithium niobate (TFLN) electro-optic Mach-Zehnder modulator (MZM) on an 8-inch silicon substrate fabricated in the back-end-of-line (BEOL) of CMOS foundry. It operates at 1550 nm with electro-optical response of only 1.5 dB roll-off at 67 GHz.

© 2024 The Author(s)

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