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Conferences > ODF > 2022 > P_OTh > P_OTh_19
  • Proceedings of the 2022 International Symposium on Imaging, Sensing, and Optical Memory (ISOM) and the 13th International Conference on Optics-photonics Design and Fabrication (ODF)
  • Technical Digest Series (Optica Publishing Group, 2022),
  • paper P_OTh_19

Defect mapping of metal contaminated Si wafers by a laser heterodyne photothermal displacement method

Tomoki Harada, Kosuke Morita, Shogo Harada, Hiroki Ohyama, Tetsuo Ikari, and Atsuhiko Fukuyama

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Abstract

To investigate the distribution of nonradiative recombination centers of semiconductors, we developed a laser heterodyne photothermal displacement method. Mapping measurement for contaminated Si was conducted and revealed the defect patterns.

© 2022 IEEE

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