Abstract
Compact multilayer Si/SiO2 asymmetric GRIN lens (length:10~20μm) for vertical optical mode-size transformation from sub-0.5μm of nanowaveguide to ~10μm of single-mode-fiber, is proposed and designed. We report success in deposition and etching of 6~8μm multilayer Si/SiO2.
© 2009 Optical Society of America
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