Abstract
We use an array of polymer microlenses spatially matched to an array of SPADs (Single Photon Avalanche Detector) to mitigate the loss of sensitivity due to the area fill-factor. The lens array is fabricated by polymer casting in a photoresist replica mold. We report results about reproducibility of concentration factor and back focal length within an individual 32×32 array. At a C factor of 35 and a focal length F=40 µm, the spread of concentration is < 6%, and the spread of BFL is <0.5 µm.
© 2009 Optical Society of America
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