Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > DOMO > 2000 > DWA > DWA3

Micro-optical elements with arbitrary surfaces

A. Schilling, Ph. Nussbaum, I. Philipoussis, H.P. Herzig, L. Stauffer, M. Rossi, and E.-B. Kley

Not Accessible

Your library or personal account may give you access

Abstract

We present a comparison of three different technologies for the fabrication of microoptical elements with arbitrary surfaces. We used direct laser writing, binary mask lithography in combination with reactive ion etching, and graytone lithography.

© 2000 Optical Society of America

PDF Article
More Like This
Design and Fabrication of arbitrary, non-separable continuous phase elements

K.-H. Brenner, J. Bähr, and T. Schmelcher
DWA4 Diffractive Optics and Micro-Optics (DOMO) 2000

Reactive ion etching: a versatile fabrication technique for micro-optical elements

Margit Ferstl
DTuD.21 Diffractive Optics and Micro-Optics (DOMO) 1998

Computer Aided Control of Laser Writing System for Fabricating Continuous-Relief Micro-Optical Elements

Y. C. Chan, C. Wang, C Y Liaw, and Y. L Lam
CTuO5 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2000

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use