Abstract
Two-dimensional Laser Induced Fluorescence (2D-LIF) measurements are applied to the chemical vapour deposition (CVD) of diamond by an oxyacetylene flame. The fluorescence distributions of C2, CH and OH are measured for various deposition conditions. The influence of the temperature of the molybdenum substrate and the distance between the substrate and the flame front on the two-dimensional distributions and on the quality and morphology of the deposited diamond is investigated. A clear relation is observed between the C2 distribution in the flame and the local growth rate and quality of the diamond layer, therefore C2 is thought to be an important species for diamond growth. Due to lower signal to noise ratios the role of CH as a growth species is less clear. The OH radical is not observed in the boundary layer, so OH seems to be of minor importance. All measurements are performed during diamond deposition.
© 1995 Optical Society of America
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