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Conferences > CLEO_SI > 2022 > SM4G > SM4G.6

Bragg Reflector Co-integrated with SiN and a-Si on 300 mm Wafers for Low Loss Optical Beamformers

A. Marinins, J. Kjellman, M. Prost, T. D. Kongnyuy, S. Saseendran, M. S. Dahlem, X. Rottenberg, R. Jansen, and P. Soussan

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Abstract

We demonstrate a build-up consisting of SiN and a-Si photonics with a Bragg reflector, targeted at optical beamforming applications. We developed CMOS-compatible low-loss PVD SiN waveguides and grating couplers with enhanced efficiency.

© 2022 The Author(s)

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