Abstract
We report the fabrication of low temperature deposited polysilicon waveguides using a laser annealing process. Micro-Raman and XRD measurements reveal the quasi-single crystal-like quality of the material, which exhibits low optical losses of 5.13 dB/cm.
© 2017 Optical Society of America
PDF ArticleMore Like This
Y. Franz, A. F. J. Runge, S. Z. Oo, N. Healy, G. Martinez-Jimenez, A. Z. Khokhar, A. Tarazona, H. M. H. Chong, S. Mailis, and A. C. Peacock
CE_6_5 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2017
Yoon Ho Daniel Lee, Michael O. Thompson, and Michal Lipson
CTu2F.5 CLEO: Science and Innovations (CLEO:S&I) 2013
J.W. Parks, H. Cai, T. Wall, M. Stott, E. Hamilton, R. Chu, A.R. Hawkins, and H. Schmidt
STh3G.4 CLEO: Science and Innovations (CLEO:S&I) 2015