Abstract
In this work we show the ultrafast laser fabrication of ridge waveguides in a (Yb,Nb):RbTiOPO4 (RTP) epilayer grown on a RTP substrate by liquid phase epitaxy [1]. The ribs are produced by machining trenches on the surface of the (Yb,Nb):RTP epilayer. In order to improve the verticality and roughness of the walls of the trenches, we have used the approximation scanning technique [2]. This approach has been enhanced in terms of speed and flexibility by using a Spatial Light Modulator (SLM) to multiplex the irradiation beam.
© 2013 IEEE
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