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Conferences > CLEO_Europe > 1996 > CThG > CThG5

Characterization of Excimer Laser Beam Parameters

K. Mann, J. Ohlenbusch, V. Westphal, and H.S. Albrecht

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Abstract

For a variety of excimer laser applications, e.g. in material micro-processing, precise control over the spatial profile of the laser beam is essential. This strongly requires high resolution techniques for acquisition of energy density distributions and accurate methods for subsequent evaluation of the relevant laser beam parameters.

© 1996 IEEE

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