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Conferences > CLEO_AT > 2023 > AM3M > AM3M.5

Aluminum Nitride Nanophotonic Phased Array on an 8-inch Silicon Wafer

Nanxi Li, Leh Woon Lim, Jin Xue, Chong Pei Ho, Shiyang Zhu, Yuan Hsing Fu, and Lennon Y. T. Lee

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Abstract

A nanophotonic phased array is demonstrated on aluminum nitride photonics platform developed on an 8-inch silicon wafer. A beam spot at 1550 nm is clearly observed. Total power loss of 11.4 dB is also reported.

© 2023 The Author(s)

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