Abstract
We fabricated ultrahigh Q silica microdisks using conventional photolithog- raphy followed by chemo-mechanical polishing. Through this procedure, optical quality factor exceeding one hundred million was obtained.
© 2021 The Author(s)
PDF Article | Presentation VideoMore Like This
Kirill N. Min’kov, Artem E. Shitikov, A. N. Danilin, Valery E. Lobanov, and Igor A. Bilenko
JTu1A.102 Frontiers in Optics (FiO) 2021
J. Lin, W. Fang, Y. Cheng, S. J. Yu, Y. G. Ma, F. He, L. Qiao, L. Tong, and Z. Xu
CTh5C.9 CLEO: Science and Innovations (CLEO:S&I) 2012
Shahin Honari and Tao lu
CThA8C_01 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2022