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Conferences > CLEO_AT > 2013 > AF2J > AF2J.2

Finding defects in a 22 nm node wafer with visible light

Renjie Zhou, Gabriel Popescu, and Lynford L. Goddard

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Abstract

Despite a diffraction limited lateral resolution of 360 nm, we detected 20 nm by 110 nm defects in a patterned 22 nm node wafer using quantitative phase and amplitude images from epi-illumination diffraction phase microscopy.

© 2013 Optical Society of America

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