Abstract
Terahertz antireflective structures on Si substrates are fabricated by femtosecond laser processing. The structure is constituted by periodic grooves at micro order. Their antireflective characteristics are evaluated by THz-TDS (terahertz time-domain spectroscopy). The results show that the surface reflectance is almost decreased to 0 and antireflection band was widened by improving aspect ratio of grooves.
© 2018 The Author(s)
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