Abstract
Laser ablation provides a unique means to deposit a variety of thin films, but micron-size particles are normally mixed in deposits. The particle problem is in particular serious for deposition of amorphous silicon (a-Si) films. In this work, we made attempts to obtain particle-free a-Si thin films by laser ablation.
© 1995 IEEE
PDF ArticleMore Like This
Takeo Fujii, Hiroki Shima, Naotaka Matsumoto, and Fumihiko Kannari
MD.7 Organic Thin Films for Photonic Applications (OTF) 1995
T. Fujii, H. Shima, N. Matsumoto, and F. Kannari
P85 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 1995
S. Inoue, T. Fujii, and F. Kannari
ThN4 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 1995