Towards fast femtosecond laser micromachining of glass, effect of deposited energy.

Sheeba Rajesh; Yves Bellouard.

doi:10.1364/CLEO.2010.JTuD18

Conference on Lasers and Electro-Optics 2010
OSA Technical Digest (CD) (Optica Publishing Group, 2010),
paper JTuD18
•https://doi.org/10.1364/CLEO.2010.JTuD18

Towards fast femtosecond laser micromachining of glass, effect of deposited energy.

Sheeba Rajesh and Yves Bellouard.

Conference on Lasers and Electro-Optics 2010

San Jose, California United States
16–21 May 2010
ISBN: 978-1-55752-889-6

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Joint CLEO/QELS Poster Session I (JTuD)

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S. Rajesh and Y. Bellouard., "Towards fast femtosecond laser micromachining of glass, effect of deposited energy.," in Conference on Lasers and Electro-Optics 2010, OSA Technical Digest (CD) (Optica Publishing Group, 2010), paper JTuD18.

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Abstract

We report on the effect of deposited energy for micro-machining of fused silica using femtosecond laser irradiation followed by chemical etching.

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