Abstract
The ability to measure surface profiles and determine the statistical properties of surfaces is important for many applications. Examples can be found in fields as diverse as magnetic storage and optical fabrication. In this paper, we will describe the development of a novel noncontact optical profilometer. Instead of using a single-beam system to measure the absolute displacement profile, we use a dual-beam system and measure the velocity profile.
© 1982 Optical Society of America
PDF ArticleMore Like This
M. C. George, H. Jagannath, B. R. Reddy, Gerard M. Perera, and Putcha Venkateswarlu
ThA5 Optical Fabrication and Testing (OF&T) 1988
Stephan R. Clark, Michael North-Morris, and John E. Greivenkamp
OWB.2 Optical Fabrication and Testing (OF&T) 1998
David S. Anderson, Robert E. Parks, and Lian-zhen Shao
OThA4 Optical Fabrication and Testing (OF&T) 1990